SECS/GEM Equipment Communication Platform Demo
SEMI standard equipment communication protocol monitoring and management
Communication Messages
| Time | Message | Type | Direction | Content |
|---|---|---|---|---|
| 10:30:15 | S1F3 | REQUEST | HOST | S1F3: Equipment Status Request |
| 10:30:16 | S1F4 | REPLY | EQP | S1F4: Equipment Status Data |
Communication Statistics
Total Messages156
Success Rate98.5%
Avg Response Time45 ms
Quick Commands
Equipment Status
Equipment ID
EQP001StatusEXECUTING
ProtocolHSMS
Connection Time2:34:15